| 摘要 |
<p>The invention relates to an illumination optical system (6) for transmitting illumination radiation (7) from a radiation source (5) to an object field (3), comprising at least one mirror unit (20) with a multiplicity of individual mirrors (21) which can be displaced between different displacement positions in a controlled manner and a control device (23) for controlling the displacement of the individual mirrors (21), wherein the control device (23) is configured in such a way that predetermined exclusion positions of the individual mirrors (21) can be excluded from the displacement positions that can be set.</p> |
