发明名称 |
CHAMBER COMPONENT WITH PROTECTIVE COATING SUITABLE FOR PROTECTION AGAINST FLUORINE PLASMA |
摘要 |
<p>Embodiments described herein relate to a protective coating that protects an underlying chamber component from corrosion or deterioration within a corrosive environment. The chamber component has a surface comprising a ceramic material. A coating disposed on the surface comprises magnesium oxide, lanthanum oxide, or lanthanum fluoride.</p> |
申请公布号 |
WO2014137532(A1) |
申请公布日期 |
2014.09.12 |
申请号 |
WO2014US15153 |
申请日期 |
2014.02.06 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
NGUYEN, SON T.;FONG, MICHAEL |
分类号 |
H01L21/3065 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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