| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum cleaning device and a vacuum cleaning method that can improve overall treatment capacity by shortening time required for drying workpieces.SOLUTION: A vacuum cleaning device includes: vapor generation means for generating vapor of saturation vapor pressure of a petroleum solvent; a cleaning chamber decompressed to 10 kPa or lower while accommodating workpieces; a condensation chamber located adjacent to the cleaning chamber and decompressed to 10 kPa or lower; temperature maintaining means for maintaining the condensation chamber at a temperature lower than that of the cleaning chamber; and opening/closing means for communicating the condensation chamber and the cleaning chamber with each other or shutting off the communication. By supplying vapor from the vapor generation means to the cleaning chamber that is shut off from the condensation chamber by the opening/closing means, the workpieces are cleaned. When the cleaning of the workpieces in the cleaning chamber is completed, the cleaning chamber is communicated with the condensation chamber by the opening/closing means, so as to decompress inside of the cleaning chamber to 280 Pa within a period of 44 seconds or shorter. |
