SPECTROSCOPIC SENSOR

摘要

A spectroscopic sensor 1 comprises an interference filter unit 20, having a cavity layer 21 and first and second mirror layers 22, 23 opposing each other through the cavity layer 21, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate 3, arranged on the first mirror layer 22 side, for transmitting therethrough light incident on the interference filter unit 20; a light-detecting substrate 4, arranged on the second mirror layer 23 side, for detecting the light transmitted through the interference filter unit 20; and a first coupling layer 11 arranged between the interference filter unit 20 and the light-transmitting substrate 3. The cavity layer 21 and the first coupling layer 11 are silicon oxide films.

主权项

1. A spectroscopic sensor comprising:
an interference filter unit, having a cavity layer and first and second mirror layers opposing each other through the cavity layer, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof; a light-transmitting substrate, arranged on the first mirror layer side, for transmitting therethrough light incident on the interference filter unit; a light-detecting substrate, arranged on the second mirror layer side, for detecting the light transmitted through the interference filter unit; and a first coupling layer arranged between the interference filter unit and the light-transmitting substrate; wherein the cavity layer and the first coupling layer are silicon oxide films.