主权项 |
1. A micro-electromechanical system (MEMS) apparatus, comprising:
a pillar, having a first side and a second side opposite to the first side; a supporter, having a third side and a fourth side opposite to the third side adjacent to the second side, comprising a plurality of first binding layers and a plurality of second binding layers respectively overlapping the first binding layers, and configured to support the pillar which is adjacent to but does not connect to the supporter; and a solder, located between the second side and the third side and between the first side and the fourth side, and configured to contact with and separate the pillar and the supporter. |