| 发明名称 |
SEMICONDUCTOR ANALYSIS MICROCHIP AND METHOD OF MANUFACTURING THE SAME |
| 摘要 |
According to one embodiment, a semiconductor analysis microchip configured to detect a fine particle in a sample liquid, including a semiconductor substrate, a first flow channel provided in the semiconductor substrate, to which the sample liquid is introduced, and a pore provided in the first flow channel and configured to pass the fine particle in the sample liquid. |
| 申请公布号 |
US2014252505(A1) |
申请公布日期 |
2014.09.11 |
| 申请号 |
US201314012599 |
申请日期 |
2013.08.28 |
| 申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
KOBAYASHI Kentaro;FURUYAMA Hideto |
| 分类号 |
G01N27/403;H01L21/311 |
主分类号 |
G01N27/403 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A semiconductor analysis microchip configured to detect a fine particle in a sample liquid, comprising:
a semiconductor substrate; a first flow channel provided in the semiconductor substrate, into which the sample liquid is introduced; and a pore provided in the first flow channel and configured to have the fine particle in the sample liquid pass through. |
| 地址 |
Tokyo JP |
