| 主权项 |
1. A flow regulating device comprising:
a first housing including a pressure chamber formed therein into which an operating gas is externally introduced; a second housing including a valve chamber formed therein, an upstream flow channel formed therein for providing communication between the valve chamber and an inlet port, and a downstream flow channel formed therein for providing communication between the valve chamber and an outlet port; a valve element part housed in the valve chamber, the valve element part being movable into contact with or away from a valve seat part provided on an inner circumferential surface of the valve chamber so as to form a closed state in which communication is shut off between the upstream flow channel and the downstream flow channel, or an open state in which communication is provided between the upstream flow channel and the downstream flow channel; a diaphragm connected to the valve element part, the diaphragm having a fluid facing surface which faces a fluid, and a gas facing surface which faces the operating gas; and a guide member connected to the diaphragm, the guide member being movable in an axial direction of the valve element part with the movement of the valve element part while being in a state in which the guide member is in contact with an inner circumferential surface of the pressure chamber. |
