发明名称 POLISHING COMPOSITION
摘要 A polishing composition of the present invention is used for polishing an object containing a phase-change alloy and is characterized by containing ammonium ions (NH4+). The polishing composition may further contain abrasive grains, such as colloidal silica.
申请公布号 US2014251950(A1) 申请公布日期 2014.09.11
申请号 US201214346921 申请日期 2012.09.28
申请人 Yoshizki Yukinobu;Izawa Yoshihiro 发明人 Yoshizki Yukinobu;Izawa Yoshihiro
分类号 C09G1/02 主分类号 C09G1/02
代理机构 代理人
主权项 1. A polishing composition to be used for polishing an object containing a phase-change alloy, comprising ammonium ions (NH4+).
地址 Kiyosu-shi JP