发明名称 |
PROCESSING DEVICE GROUP CONTROLLER, MANUFACTURING PROCESS SYSTEM, PROCESSING DEVICE GROUP CONTROL METHOD, MANUFACTURING OPTIMIZATION SYSTEM, MANUFACTURING OPTIMIZATION DEVICE, AND MANUFACTURING OPTIMIZATION METHOD |
摘要 |
A processing device group controller includes: a storage unit which stores an operation schedule including information of maintenance time for a plurality of processing devices for processing workpieces, with respective equipment associated with the plurality of processing devices, and a transfer plan including information of timings at which the workpieces are carried in and out of the plurality of processing devices; a detecting unit which performs a step of comparing the transfer plan and the operation schedule of each processing device, a step of specifying the last process before maintenance for each processing device, and a step of detecting the end timing of the specified process; and an instruction unit which instructs each processing device to be switched to an idle state at the end timing along with the associated equipment. |
申请公布号 |
US2014257546(A1) |
申请公布日期 |
2014.09.11 |
申请号 |
US201414284916 |
申请日期 |
2014.05.22 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
MIZUTANI Taku;NAMIOKA Ichiro;IIJIMA Toshihiko;TODATE Shigenori;ITO Takahiro |
分类号 |
G05B19/042 |
主分类号 |
G05B19/042 |
代理机构 |
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代理人 |
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主权项 |
1. A processing device group controller comprising:
a storage unit which stores an operation schedule including information of maintenance time for a plurality of processing devices for processing workpieces, with respective equipment associated with the plurality of processing devices, and a transfer plan including information of timings at which the workpieces are carried in and out of the plurality of processing devices; a detecting unit which performs a step of comparing the transfer plan and the operation schedule of each processing device, a step of specifying the last process before maintenance for each processing device, and a step of detecting the end timing of the specified process; and an instruction unit which instructs each processing device to be switched to an idle state at the end timing along with the associated equipment. |
地址 |
Tokyo JP |