发明名称 PROCESSING DEVICE GROUP CONTROLLER, MANUFACTURING PROCESS SYSTEM, PROCESSING DEVICE GROUP CONTROL METHOD, MANUFACTURING OPTIMIZATION SYSTEM, MANUFACTURING OPTIMIZATION DEVICE, AND MANUFACTURING OPTIMIZATION METHOD
摘要 A processing device group controller includes: a storage unit which stores an operation schedule including information of maintenance time for a plurality of processing devices for processing workpieces, with respective equipment associated with the plurality of processing devices, and a transfer plan including information of timings at which the workpieces are carried in and out of the plurality of processing devices; a detecting unit which performs a step of comparing the transfer plan and the operation schedule of each processing device, a step of specifying the last process before maintenance for each processing device, and a step of detecting the end timing of the specified process; and an instruction unit which instructs each processing device to be switched to an idle state at the end timing along with the associated equipment.
申请公布号 US2014257546(A1) 申请公布日期 2014.09.11
申请号 US201414284916 申请日期 2014.05.22
申请人 TOKYO ELECTRON LIMITED 发明人 MIZUTANI Taku;NAMIOKA Ichiro;IIJIMA Toshihiko;TODATE Shigenori;ITO Takahiro
分类号 G05B19/042 主分类号 G05B19/042
代理机构 代理人
主权项 1. A processing device group controller comprising: a storage unit which stores an operation schedule including information of maintenance time for a plurality of processing devices for processing workpieces, with respective equipment associated with the plurality of processing devices, and a transfer plan including information of timings at which the workpieces are carried in and out of the plurality of processing devices; a detecting unit which performs a step of comparing the transfer plan and the operation schedule of each processing device, a step of specifying the last process before maintenance for each processing device, and a step of detecting the end timing of the specified process; and an instruction unit which instructs each processing device to be switched to an idle state at the end timing along with the associated equipment.
地址 Tokyo JP