Control Apparatus for a Linear Motion Stage, and Linear Motion System

摘要

A control apparatus for a linear motion stage includes: a first filter for filtering the frequency of a signal received from a linear encoder of the linear motion stage; an adder for adding an input signal representing a command position and a negative of an output signal of the first filter; a control for generating a control signal for controlling the linear motion stage based on an output signal of the adder; and a second filter for filtering the frequency of the control signal. Each of the input terminals of the first and second filters has a correction table for storing cut-off frequencies and damping rates measured according to the driven positions of the linear motion stage, thereby applying the correction table so as to determine the cut-off frequencies of the first and second filters and the damping rates according to the driven positions of the linear motion stage.

主权项

1. A control apparatus for a linear motion stage, comprising:
a first filter adapted to filter a frequency of a signal received from a linear encoder of the linear motion stage; an adder adapted to add an input signal representing a command position and a negative of an output signal of the first filter; a control unit adapted to generate a control signal to control the linear motion stage based on an output signal of the adder; and a second filter adapted to filter a frequency of the control signal; wherein input terminals of the first filter and the second filter include a correction table for storing cut-off frequencies and damping rates measured according to driven positions of the linear motion stage, the first filter and the second filter adapted to apply the correction table to determine a cut-off frequency of the first filter and the second filter and the damping rates according to the driven positions of the linear motion stage.