METHOD AND APPARATUS FOR THE FORMATION OF COPPER-INDIUMGALLIUM SELENIDE THIN FILMS USING THREE DIMENSIONAL SELECTIVE RF AND MICROWAVE RAPID THERMAL PROCESSING

摘要

A method of depositing CIGS thin films for solar panel construction comprising: providing a chamber; providing a substrate and placing said substrate inside said chamber; providing a material source; placing said material source inside said chamber; reducing pressure within said chamber; heating said substrate and said material source using electromagnetic heating (RF and Microwaves) source; perform deposition of said material source oto said substrate.

主权项

1. A method of depositing CIGS thin film for solar panel construction comprising:
a. providing a chamber; b. providing a substrate and placing said substrate inside said chamber; c. providing a material source; d. placing metals or semi-metals in said material source inside said chamber; e. reducing pressure within said chamber; f. heating said substrate with an electromagnetic heating source; g. Heating material source with an electromagnetic heating source, h. performing deposition of said metals and/or semi-metals to said substrate.