MANUFACTURING METHOD OF OXIDE SUPERCONDUCTING THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of an oxide superconducting thin film with high Ic obtained by sufficient oriented growth of a crystal from a substrate to the surface of the film while sufficiently decomposing BaCOto curb a generation of a void caused by COgas.SOLUTION: A manufacturing method of an oxide superconducting thin film used for manufacturing a superconducting wire rod by a coating thermal decomposition method with an atmosphere furnace using a fluorine-free metal organic compound as a raw material comprises: a coating film making step in which a coating film is obtained by coating on a substrate with a solution of the metal organic compound; a calcination heat treatment step in which a calcined film is made by thermal decomposition and removal of an organic constituent contained in the metal organic compound of the coating film; and a sintering heat treatment step in which the calcined film is crystallized to be the oxide superconducting thin film. An intermediate heat treatment step is provided between the calcination heat treatment step and the sintering heat treatment step. In the intermediate heat treatment step, a carbonate contained in the calcined film is decomposed in an atmosphere of oxygen where a crystal phase of the oxide superconducting thin film is not formed.