RESIST OVERLAYER FILM FORMING COMPOSITION FOR LITHOGRAPHY

摘要

A resist overlayer film composition for lithography from which a resist overlayer film is formed. A resist overlayer film forming composition including a benzene compound having at least one amino group. A resist may be an EUV resist or an electron beam resist. The benzene compound may have at least one amino group and at least one alkyl group, one or two amino groups and one to four alkyl groups, or may be a compound of Formula (1):;;where R1 to R5 are independently a hydrogen atom, a C1-10 alkyl group such as methyl, ethyl or isopropyl, or an amino group.

主权项

1. A resist overlayer film forming composition comprising:
a benzene compound having at least one amino group.