| 发明名称 |
MAGNETIC ELECTRONIC DEVICE AND MANUFACTURING METHOD THEREOF |
| 摘要 |
A magnetic electronic device comprises a substrate, a buffer layer, a first CoFeB layer, a first metal oxidation layer and a capping layer. The buffer layer is disposed above the substrate. The first CoFeB layer is disposed above the buffer layer. The first metal oxidation layer is disposed above the first CoFeB layer. The capping layer is disposed above the first metal oxidation layer and covers the first metal oxidation layer. A manufacturing method of the magnetic electronic device is also disclosed. |
| 申请公布号 |
US2014252515(A1) |
申请公布日期 |
2014.09.11 |
| 申请号 |
US201314063301 |
申请日期 |
2013.10.25 |
| 申请人 |
National Tsing Hua University |
发明人 |
LAI Chih-Huang;WANG Ding-Shuo |
| 分类号 |
H01L43/02;H01L43/12 |
主分类号 |
H01L43/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A magnetic electronic device, comprising:
a substrate; a buffer layer disposed above the substrate; a first CoFeB layer disposed above the buffer layer; a first metal oxidation layer disposed above the first CoFeB layer; and a capping layer disposed above the first metal oxidation layer and covering the first metal oxidation layer. |
| 地址 |
Hsinchu City TW |
