发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 In one embodiment, a semiconductor device can include: (i) a first doped pillar region having a doping concentration that sequentially increases from bottom to top in a vertical direction; (ii) second doped pillar regions arranged on either side of the first doped pillar region in a horizontal direction; and (iii) where sidewalls of the second doped pillar regions form sides of an inverted trapezoidal structure.
申请公布号 US2014252456(A1) 申请公布日期 2014.09.11
申请号 US201414173133 申请日期 2014.02.05
申请人 Silergy Semiconductor Technology (Hangzhou) LTD 发明人 Liao Zhongping
分类号 H01L29/10;H01L29/66;H01L29/78 主分类号 H01L29/10
代理机构 代理人
主权项 1. A semiconductor device, comprising: a) a first doped pillar region having a doping concentration that sequentially increases from bottom to top in a vertical direction; b) second doped pillar regions arranged on either side of said first doped pillar region in a horizontal direction; and c) wherein sidewalls of said second doped pillar regions form sides of an inverted trapezoidal structure.
地址 Hangzhou CN