| 摘要 |
PROBLEM TO BE SOLVED: To provide an analyser that allows supplementation of ionic liquid lost from an analysis sample surface by electron beam irradiation, laser irradiation or ion beam irradiation in a vacuum within the analyser, and that can stably maintain the coating effect of the ionic liquid from start of analysis to finish of analysis.SOLUTION: The analyser that irradiates an analysis sample with an electron beam, a laser or ion beam, etc., and analyses electrons, ions and the like emitted from the analysis sample, comprises an ionic liquid beam source emitting an ionic liquid beam. The ionic liquid beam source irradiates the analysis sample placed in the vacuum with the ionic liquid beam, and supplies the analysis sample surface with the ionic liquid to coat it. Accordingly, an amount of coating of the ionic liquid can be stably maintained from start of analysis to finish of analysis. |
