| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a photoelectric composite substrate having a polymer waveguide with low optical loss.SOLUTION: A core 1 is formed by laminating a polymeric material 11 for the core over a lower clad 2a and carrying out a patterning. A polymer waveguide 3 constituted of the core 1 and a clad 2 is formed on the substrate 4 by forming an upper clad 2b which laminates a polymeric material 12 for the clad over the core 1 to cover the core 1. The polymeric material 11 for the core has a refractive index higher that of the polymeric material 12 for the clad. After laminating the polymeric material 12 over the core 1, the polymeric material 12 for the clad is heated to soften or melt the same to thereby reduce the refractive index of the surface layer of the core 1. Thus, the core 1 of the polymer waveguide 3 is formed in which, when a beam of light is allowed to enter from one end of the core 1 and the light is allowed to output from the other end of the core 1, the intensity distribution of the output light is the highest in a center of the core 1 and is low at least a part in the vicinity of the boundary of the clad 2.</p> |
