| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor which is compact and can be simply attached.SOLUTION: A displacement sensor 100 includes an exciting coil 11 to which an AC voltage is applied; a movable body 12 which is composed of a non-magnetic metal material, and moves relative to the exciting coil 11 while facing the exciting coil 11; a detection unit 13 including at least three detection coils 31, 32, and 33 which are stacked and arranged between the exciting coil 11 and the movable body 12 along a facing direction of the exciting coil 11 and the movable body 12, and are magnetically coupled with the exciting coil 11; a characteristic memory unit 14 for preliminarily storing a displacement quantity characteristic in which a relation between outputs of the detection coils 31, 32, and 33 and the displacement quantity of the movable body is defined; and a displacement quantity identifying unit 15 for identifying the displacement quantity of the movable body relative to the detection unit 13 on the basis of the outputs of the three detection coils 31, 32, and 33 obtained according to the displacement of the movable body 12, and the displacement quantity characteristic. |
