SCATTERING ENHANCED THIN ABSORBER FOR EUV REFLECTIVE RETICLE AND A METHOD OF MAKING

摘要

A scattering enhanced thin absorber for a EUV reticle and a method of making thereof is disclosed. Embodiments include forming a multilayer on the upper surface of a substrate, forming a capping layer over the multilayer, forming one or more diffuse scattering layers over the capping layer, and etching the diffuse scattering layers to form a stack.

主权项

1. A method comprising:
forming a multilayer on an upper surface of a substrate; forming a capping layer over the multilayer; forming one or more diffuse scattering layers over the capping layer; and etching the diffuse scattering layers to form a stack.