发明名称 |
ACCELERATION SENSOR |
摘要 |
An acceleration sensor can ensure rigidity of its movable electrode despite a large number of through-holes formed in the movable electrode. The acceleration sensor has an SOI substrate in which a silicon oxide layer is formed on a silicon support layer and an active silicon layer is formed on the silicon oxide layer, wherein the active silicon layer of the SOI substrate has a movable electrode supported by elastic beams and configured with a weight, and also has fixed electrodes disposed in a fixed manner around the movable electrode to face the movable electrode, and wherein through-holes penetrating in a Z-axis direction are formed over the entire surface on the inner side of an outer circumference to which the elastic beams of the movable electrode are connected. |
申请公布号 |
US2014251013(A1) |
申请公布日期 |
2014.09.11 |
申请号 |
US201214350806 |
申请日期 |
2012.11.12 |
申请人 |
FUJI ELECTRIC CO., LTD. |
发明人 |
Sakaue Satoru;Yao Hironobu;Kishiro Masami;Suzuki Takeshi |
分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
1. An acceleration sensor, comprising an SOI substrate in which a silicon oxide layer is formed on a silicon support layer and an active silicon layer is formed on the silicon oxide layer,
the active silicon layer of the SOI substrate being formed to have a movable electrode supported by elastic beams and configured with a weight, and also have fixed electrodes disposed in a fixed manner around the movable electrode to face the movable electrode, and through-holes penetrating in a Z-axis direction being formed over an entire surface on an inner side of an outer circumference to which the elastic beams of the movable electrode are connected. |
地址 |
Kawasaki-shi JP |