TILT THE MIRROR SHAPE BY CONTROLLING THE INTERFERENCE DISTANCE MEASURING DEVICE

摘要

The present invention relates to a shape measuring device for controlling an interference distance using a tilt mirror and, more particularly, to a shape measuring device for measuring a distance by obtaining an interference pattern. The shape measuring device comprises: a laser source which radiates lasers; a beam splitter which divides light radiated from the laser source into measuring light and reference light; a reference mirror which generates reference light using light penetrating the beam splitter; a tilt mirror which rotates through a rotating unit to generate a position difference of incidence (reflection), in order to generate a length difference in a path of light reflected by an object whose distance is measured after being reflected by the beam splitter; an image sensor which obtains interference light reflected by the object; and an image processing unit which calculates image information on the object by compensating for reflected light obtained by the image sensor, a rotation value and tilt angle information of the tilt mirror.