发明名称 |
METHODS OF REPAIRING DAMAGED INSULATING MATERIALS BY INTRODUCING CARBON INTO THE LAYER OF INSULATING MATERIAL |
摘要 |
One illustrative method disclosed herein includes providing a layer of a carbon-containing insulating material having a nominal carbon concentration, performing at least one process operation on the carbon-containing insulating material that results in the formation of a reduced-carbon-concentration region in the layer of carbon-containing insulating material, wherein the reduced-carbon-concentration region has a carbon concentration that is less than the nominal carbon concentration, performing a carbon-introduction process operation to introduce carbon atoms into at least the reduced-carbon-concentration region and thereby define a carbon-enhanced region having a carbon concentration that is greater than the carbon concentration of the reduced-carbon-concentration region and, after introducing the carbon atoms, performing a heating process on at least the carbon-enhanced region. |
申请公布号 |
US2014256064(A1) |
申请公布日期 |
2014.09.11 |
申请号 |
US201313789966 |
申请日期 |
2013.03.08 |
申请人 |
GLOBALFOUNDRIES INC. |
发明人 |
Taylor, JR. William J.;LiCausi Nicholas V.;Ryan Errol Todd |
分类号 |
H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
1. A method, comprising:
providing a layer of a carbon-containing insulating material having a nominal carbon concentration; performing at least one process operation on said carbon-containing insulating material that results in the formation of a reduced-carbon-concentration region in said layer of carbon-containing insulating material, wherein said reduced-carbon-concentration region has a carbon concentration that is less than said nominal carbon concentration; performing a carbon-introduction process operation to introduce carbon atoms into at least said reduced-carbon-concentration region and thereby define a carbon-enhanced region having a carbon concentration that is greater than said carbon concentration of said reduced-carbon-concentration region; and after introducing said carbon atoms, performing a heating process on said carbon-containing insulating material. |
地址 |
Grand Cayman KY |