发明名称 METHODS OF REPAIRING DAMAGED INSULATING MATERIALS BY INTRODUCING CARBON INTO THE LAYER OF INSULATING MATERIAL
摘要 One illustrative method disclosed herein includes providing a layer of a carbon-containing insulating material having a nominal carbon concentration, performing at least one process operation on the carbon-containing insulating material that results in the formation of a reduced-carbon-concentration region in the layer of carbon-containing insulating material, wherein the reduced-carbon-concentration region has a carbon concentration that is less than the nominal carbon concentration, performing a carbon-introduction process operation to introduce carbon atoms into at least the reduced-carbon-concentration region and thereby define a carbon-enhanced region having a carbon concentration that is greater than the carbon concentration of the reduced-carbon-concentration region and, after introducing the carbon atoms, performing a heating process on at least the carbon-enhanced region.
申请公布号 US2014256064(A1) 申请公布日期 2014.09.11
申请号 US201313789966 申请日期 2013.03.08
申请人 GLOBALFOUNDRIES INC. 发明人 Taylor, JR. William J.;LiCausi Nicholas V.;Ryan Errol Todd
分类号 H01L21/02 主分类号 H01L21/02
代理机构 代理人
主权项 1. A method, comprising: providing a layer of a carbon-containing insulating material having a nominal carbon concentration; performing at least one process operation on said carbon-containing insulating material that results in the formation of a reduced-carbon-concentration region in said layer of carbon-containing insulating material, wherein said reduced-carbon-concentration region has a carbon concentration that is less than said nominal carbon concentration; performing a carbon-introduction process operation to introduce carbon atoms into at least said reduced-carbon-concentration region and thereby define a carbon-enhanced region having a carbon concentration that is greater than said carbon concentration of said reduced-carbon-concentration region; and after introducing said carbon atoms, performing a heating process on said carbon-containing insulating material.
地址 Grand Cayman KY