LAMPHEAD PCB WITH FLEXIBLE STANDOFFS

摘要

The embodiments described herein generally relate to a flexible standoff for use with a lamphead assembly in a thermal processing chamber. In one embodiment, the lamphead assembly can include a lamphead with one or more fixed lamphead positions, a lamp bulb, a lamp base with a standoff contact adaptor and a flexible standoff capable of attaching and positioning the lamp assembly. The flexible standoff can include a socket configured to receive a lamp base of a lamp assembly, a housing configured to position a lamp bulb of a lamp assembly in thermal connection with a processing chamber, a contact adaptor configured to electrically connect to a power supply and a conductive material to electrically connect the socket and the contact adaptor.

主权项

1. A thermal process structure comprising:
a power distribution member comprising one or more contact points; one or more standoffs, each comprising a socket and an adaptor, wherein the adaptor electrically connects with at least one of the one or more contact points one or more radiation source bases, each with a standoff contact adaptor electrically connected with the socket; and one or more radiation sources, wherein each radiation source is electrically connected with one of the one or more radiation source bases.