GALVANOMETER SCANNED CAMERA WITH VARIABLE FOCUS AND METHOD

摘要

A camera assembly for generating a high resolution image of an area of interest on a workpiece includes a sensor array and an optical lens that focuses light reflected from the workpiece onto the sensor array. The sensor array is inclined relative to an optical axis defined by the optical lens disposed in a fixed position relative to the optical lens. A galvanometer driven minor assembly directs a field of view of the optical lens toward the area of interest on the workpiece translating light reflected from the area of interest of the workpiece onto the sensor array. The inclination of the sensor array provides varying degrees of resolution relative to a distance of the workpiece area of interest from the camera assembly enabling the camera assembly to generate high resolution images at varying distances from the camera assembly without adjusting the optical lens relative to the sensor array.

主权项

1. A method for inspecting a workpiece by generating a high resolution image, comprising the steps of:
providing a sensor array and an optical lens defining an optical axis for focusing a view of the workpiece onto said sensor array; providing a minor assembly having an orientation for redirecting the view of said sensor array; inclining said sensor array relative to said optical axis of said optical lens; altering the orientation of said mirror assembly for directing the view of said sensor array to an area of interest on the workpiece and said optical lens directing the view of the area of interest to a portion of said sensor array determined to increase resolution of an image generated of the area interest on the workpiece based upon the angle of incline of said sensor array relative to said optical axis.