METHODS FOR FABRICATING INTEGRATED CIRCUITS UTILIZING SILICON NITRIDE LAYERS

摘要

A method of fabricating an integrated circuit includes the steps of providing a semiconductor substrate comprising a semiconductor device disposed thereon and depositing a first silicon nitride layer over the semiconductor substrate and over the semiconductor device using a first deposition process. The first deposition process is a plasma-enhanced chemical vapor deposition (PECVD) process that operates over a plurality of cycles, each cycle having a first time interval and a second time interval. The PECVD process includes the steps of generating a plasma with a power source during the first time interval, the plasma comprising reactive ionic and radical species of a silicon-providing gas and a nitrogen-providing gas, and discontinuing generating the plasma during the second time interval immediately subsequent to the first time interval. The method further includes depositing a second silicon nitride layer over the first silicon nitride layer after the plurality of cycles.

主权项

1. A method of fabricating an integrated circuit comprising the steps of:
providing a semiconductor substrate comprising a semiconductor device disposed thereon; depositing a first silicon nitride layer over the semiconductor substrate and over the semiconductor device using a first deposition process, wherein the first deposition process is a plasma-enhance chemical vapor deposition (PECVD) process that operates over a plurality of cycles, each cycle having a first time interval and a second time interval, the PECVD process comprising the steps of:
generating a plasma with a power source during the first time interval, the plasma comprising reactive ionic and radical species of a silicon-providing gas and a nitrogen-providing gas; anddiscontinuing generating the plasma during the second time interval immediately subsequent to the first time interval; and depositing a second silicon nitride layer over the first silicon nitride layer after the plurality of cycles.