THERMAL COUPLED QUARTZ DOME HEAT SINK

摘要

Embodiments described herein generally relate to apparatus for processing substrates. The apparatus generally include a process chamber having a substrate support therein. A plurality of lamps are positioned to provide radiant energy through an optically transparent window to a substrate positioned on the substrate support. The plurality of lamps are positioned in a lamp housing. A cooling channel is formed in the lamp housing. A surface of the lamp housing is spaced a distance from the optically transparent window to form a gap therebetween. The gap functions as a fluid channel and is adapted to contain a fluid therein to facilitate cooling of the optically transparent window. Turbulence inducing features, such as openings, formed in the surface of the lamp housing induce a turbulent flow of the cooling fluid, thus improving heat transfer between the optically transparent window and the lamp housing.

主权项

1. A process chamber, comprising:
a chamber body including an optically transparent window; a lamp housing disposed adjacent to the optically transparent window, the optically transparent window and the lamp housing having a gap therebetween; a plurality of lamps disposed within the lamp housing; one or more cooling channels disposed within the lamp housing; and a temperature control unit adapted to provide a cooling fluid to the gap between the optically transparent dome and the lamp housing.