INSPECTION DEVICE WITH VERTICALLY MOVEABLE ASSEMBLY

摘要

The inspection of semiconductors or like substrates by the present mechanism minimizes deflection in the checkplate and probe card. An inspection device including a housing, a toggle assembly within the housing, an objective lens assembly attached within the toggle assembly including an objective coupled within an objective focus, wherein the objective focus is deflectable along an optics axis, and a cam assembly including a rotary cam and a window carrier, wherein the window carrier is moveable along the optics axis with rotation of the rotary cam, wherein the cam assembly is coupled to the toggle assembly with the objective and window are aligned along the optics axis.

主权项

1. An inspection device comprising:
a carrier; a housing, the carrier being located within the housing and being reciprocable between a retracted position and an extended position; and an actuator positioned within the housing such that at least one actuating surface of the actuator may selectively bear against at least one bearing surface of the carrier, the actuator being actuatable between a first position in which the bearing surface permits the carrier to remain or return to its retracted position and a second position in which force is exerted by the at least one actuating surface against the at least one bearing surface of the carrier to move the carrier to its extended position.