发明名称 |
Nanodot-Enhanced Hybrid Floating Gate for Non-Volatile Memory Devices |
摘要 |
A memory device and a method of making a memory device that includes a semiconductor channel, a tunnel dielectric layer located over the semiconductor channel, a floating gate located over the tunnel dielectric layer, the floating gate comprising a continuous layer of an electrically conductive material and at least one protrusion of an electrically conductive material facing the tunnel dielectric layer and electrically shorted to the continuous layer, a blocking dielectric region located over the floating gate, and a control gate located over the blocking dielectric layer. |
申请公布号 |
US2014252447(A1) |
申请公布日期 |
2014.09.11 |
申请号 |
US201313792662 |
申请日期 |
2013.03.11 |
申请人 |
SANDISK TECHNOLOGIES, INC. |
发明人 |
Lee Donovan;Kai James K.;Samachisa George;Chien Henry;Matamis George;Purayath Vinod R. |
分类号 |
H01L29/788;H01L29/66 |
主分类号 |
H01L29/788 |
代理机构 |
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代理人 |
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主权项 |
1. A memory device, comprising:
a semiconductor channel; a tunnel dielectric layer located over the semiconductor channel; a floating gate located over the tunnel dielectric layer, the floating gate comprising a continuos layer of an electrically conductive material and at least one protrusion of an electrically conductive material facing the tunnel dielectric layer and electrically shorted to the continuos layer; a blocking dielectric region located over the floating gate; and a control gate located over the blocking dielectric layer. |
地址 |
Plano TX US |