IMPRINTING DEVICE AND IMPRINTING METHOD

摘要

The present invention provides an imprinting device and an imprinting method which can uniformly apply pressure between a mold and a molding object and which can increase/decrease a temperature at a fast speed. An imprinting device (1) is for transferring a pattern on a mold (100) to a film molding object (200), and comprises a stage (11) for holding the mold (100), a pressurizing-chamber casing (13) which configures a pressurizing chamber (12) together with the molding object (200), sealing means (14) which airtightly seals a space between the pressurizing-chamber casing (13) and the molding object (200), opening/closing means (15) which opens/closes the space between the pressurizing-chamber casing (13) and the molding object (200), pressurizing means (16) which adjusts atmospheric pressure in the pressurizing chamber (12), heating means (17) which heats either one of or both of the mold (100) and the molding object (200), and degassing means (18) which eliminates any gas present between the mold (100) and the molding object (200).