The machine has a measurement head (3) with which the workpiece can be sensed in 3 spatial directions relative to the measurement table (2) and a first measurement head carrier (6) movable on rails (5) in a first spatial direction and with elements with which the head can be moved in at least one further orthogonal spatial direction. The guide rails are mounted on an intrinsically stiff base body (8) attached to a support (4).
申请公布号
EP1500903(B9)
申请公布日期
2014.09.10
申请号
EP20040017376
申请日期
2004.07.22
申请人
CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH
发明人
POGLITSCH, CHRISTOF;JACOBS, KLAUS;WIEDMANN, WOLFGANG;GRIESER, CHRISTOPH;LONARDONI, RONALD;LEITENBERGER, WERNER