| 发明名称 |
DEVICE AND METHOD FOR COATING A MICRO- AND/OR NANO-STRUCTURED STRUCTURAL SUBSTRATE AND COATED STRUCTURAL SUBSTRATE |
| 摘要 |
<p>The invention relates to a device (1) and a method for coating a micro- and/or nano-structured structural substrate (8). According to the invention, coating proceeds in a vacuum chamber (3). The pressure level in the vacuum chamber (3) is increased while or after the coating substance is fed to the vacuum chamber (3).</p> |
| 申请公布号 |
EP1999779(B1) |
申请公布日期 |
2014.09.10 |
| 申请号 |
EP20070723216 |
申请日期 |
2007.03.13 |
| 申请人 |
THALLNER, ERICH |
发明人 |
THALLNER, ERICH;MITTENDORFER, GERALD;THANNER, CHRISTINE |
| 分类号 |
B81C99/00;G03F7/16;H01L21/67 |
主分类号 |
B81C99/00 |
| 代理机构 |
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代理人 |
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