| 摘要 |
PROBLEM TO BE SOLVED: To inspect an inspected surface of an object over a prescribed range, while suppressing the enlargement of a device. SOLUTION: An inspection device 1 includes: a light source 11 for radiating a light ray L; a half mirror 12 for reflecting the light ray L from the light source 11 and irradiating the inspected surface of an object W with the light ray L; imaging means 13 arranged on the opposite side of the half mirror from the object W to image the inspected surface of the object W irradiated with the light ray L from the light source 11 via the half mirror 12; and a processing part 14 for inspecting the object W on the basis of imaging data from the imaging means 13. The light source 11 radiates an annular light ray L whose diameter is gradually increased as being separated from the light source 11 in a light axial direction. The device 1 also includes driving means 15 for separably supporting the light source 11 in the light axial direction with respect to the half mirror 12. COPYRIGHT: (C)2012,JPO&INPIT |
