Magnetic sensor and method of fabricating the same
摘要
Provided are a magnetic sensor and a method of fabricating the same. The magnetic sensor includes: hall elements disposed in a substrate, a protection layer disposed on the substrate, a seed layer disposed on the protection layer, and an integrated magnetic concentrator (IMC) formed on the seed layer, the seed layer and the IMC each having an uneven surface.
申请公布号
EP2775314(A1)
申请公布日期
2014.09.10
申请号
EP20130182302
申请日期
2013.08.29
申请人
MAGNACHIP SEMICONDUCTOR LTD.
发明人
KIM, KWAN SOO;KIM, DONG JOON;RYU, SEUNG HAN;AN, HEE BAEG;JEONG, JONG YEUL;KIM, KYUNG SOO;SHIN, KANG SUP