发明名称 Method of studying a cryogenic sample in an optical microscope
摘要 A method of studying a sample using an optical microscope, comprising the following steps: - Providing the sample in a sample holder comprising means to maintain the sample at a temperature T below 273 K; - Providing a microscope objective lens having an extremal lens element proximal the sample holder; - Bringing the lens into a focus position proximal the sample, the extremal lens element and sample being separated by an intervening space, which method comprises the following steps: - Providing the objective lens in a thermally insulating jacket; - Providing a transparent window in said intervening space, with a gap between the window and the extremal lens element; - Providing a flow of substantially dry gas in said gap; - Tailoring the geometry and velocity of said flow so that, at least in said gap, the flow: - Is non-laminar; - Does not excite substantial acoustic vibration in a structure proximal the gap. Said structure may, for example, be at least one of: - The window; - The sample; - The sample holder.
申请公布号 EP2775338(A1) 申请公布日期 2014.09.10
申请号 EP20130157564 申请日期 2013.03.04
申请人 FEI COMPANY 发明人 DAUM, RAINER;MAYER, TOBIAS;GEISBAUER, MATTHIAS;SCHAMPERS, RUUD;PERSOON, JOHANNES
分类号 G02B27/00;G02B21/28 主分类号 G02B27/00
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