| 摘要 |
A hopper is configured to supply a fine particle material. The hopper includes a container configured to accommodate therein a material in a powder form having a diameter ranging from about 0.1 µm to about 10 µm; a pressure controller configured to apply a pressure difference to an inside of the container periodically; and a shaker configured to apply vibration to the container. Further, the material accommodated in the container is supplied through a hole, which is formed at the container, by the periodic pressure difference and the vibration, and is carried by a carrier gas. |
