发明名称
摘要 <P>PROBLEM TO BE SOLVED: To ensure a bonding strength and achieve an improvement in bonding reliability in stitch bonding at wire bonding. <P>SOLUTION: Height control of a capillary is performed in stitch bonding (2nd bonding) at wire bonding, so that the thickness of the stitch portion can be controlled, thereby ensuring the bonding strength and achieving the improvement in the bonding reliability. Also, since the thickness of the stitch portion can be ensured, copper lines can be used for wire bonding and the cost of the wire bonding can be reduced. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP5586901(B2) 申请公布日期 2014.09.10
申请号 JP20090207952 申请日期 2009.09.09
申请人 发明人
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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