发明名称 |
Tilt-Mode Accelerometer with improved Offset and Noise Performance |
摘要 |
<p>A single-axis tilt-mode microelectromechanical accelerometer structure. The structure includes a substrate having a top surface defined by a first end and a second end. Coupled to the substrate is a first asymmetrically-shaped mass suspended above the substrate pivotable about a first pivot point on the substrate between the first end and the second end and a second asymmetrically-shaped mass suspended above the substrate pivotable about a second pivot point on the substrate between the first end and the second end. The structure also includes a first set of electrodes positioned on the substrate and below the first asymmetrically-shaped mass and a second set of electrodes positioned on the substrate and below the second asymmetrically-shaped mass.</p> |
申请公布号 |
EP2775309(A1) |
申请公布日期 |
2014.09.10 |
申请号 |
EP20140156641 |
申请日期 |
2014.02.25 |
申请人 |
ANALOG DEVICES, INC. |
发明人 |
ZHANG, XIN;SAMUELS, HOWARD;JUDY, MICHAEL |
分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|