发明名称 Carbon dioxide sensor
摘要 Chemical sensors such as carbon dioxide sensors and methods for making such sensors are disclosed. An example carbon dioxide sensor may include a substrate, with a sensing beam supported by the substrate. The sensing beam may be configured to resonant. A sensing layer may be disposed on the sensing beam, wherein the sensing layer may include an amino group and is configured to sense carbon dioxide. In some instances, a reference beam may also be supported by the substrate, and may be configured to resonant. A reference layer may be disposed on the reference beam, wherein the reference layer may includes an amino group that has been poisoned so that it will be substantially non-sensitive to carbon dioxide.
申请公布号 US8826724(B2) 申请公布日期 2014.09.09
申请号 US201113333752 申请日期 2011.12.21
申请人 Honeywell International Inc. 发明人 Serban Bogdan;Mihalia Mihai N.;Cobianu Cornel;Dumitru Viorel Georgel;Buiu Octavian
分类号 G01N29/00;G01N29/036;G01N29/22;G01N29/02;G01N33/00 主分类号 G01N29/00
代理机构 Seager Tufte & Wickhem LLC 代理人 Seager Tufte & Wickhem LLC
主权项 1. A carbon dioxide sensor, comprising: a substrate; a sensing beam supported by the substrate, the sensing beam configured to resonate; a sensing layer disposed on the sensing beam, wherein the sensing layer includes an amino group and is configured to sense carbon dioxide; a reference beam supported by the substrate, the reference beam configured to resonate; and a reference layer disposed on the reference beam, wherein the reference layer includes an amino group that has been poisoned via reaction with an acid so that the amino group will be substantially non-sensitive to carbon dioxide.
地址 Morristown NJ US