Substrate processing apparatus, storage device, and method of transporting substrate storing container

摘要

In a substrate processing apparatus, a storage device, an indexer block, a processing block and an interface block are arranged to line up in this order. The storage device includes a plurality of openers on which a carrier storing a plurality of substrates can be placed. The carrier is carried in the storage device. In the storage device, the carrier is transported among the plurality of openers by a transport device. The transport device includes first and second hands configured to be able to hold the carrier and move in a horizontal direction and a vertical direction. The second hand is provided below the first hand.

主权项

1. A substrate processing apparatus arranged to perform given processing on substrates, comprising:
a storage device in and from which a substrate storing container storing a plurality of substrates is carried; a main body arranged to take out the substrates from said substrate storing container carried in said storage device, perform the given processing on the taken out substrates, and store the substrates after the processing in said substrate storing container carried in said storage device; and a controller arranged to control an operation of said storage device, wherein said storage device includes: a plurality of platforms on one of which said substrate storing container is to be placed; and a transport device arranged to transport said substrate storing container among said plurality of platforms, said transport device includes first and second holders configured to be able to hold said substrate storing container and move among said plurality of platforms, wherein said second holder is provided below said first holder, said first and second holders are configured to be capable of moving independently from each other along a common axis extending in a vertical direction, said controller controls said transport device, with one substrate storing container placed on any one of said platforms, to hold another substrate storing container using one of said first and second holders and cause said another substrate storing container to wait in a position opposite to said one platform, and when said one substrate storing container placed on said one platform is ready to be transported, to hold and take out said one substrate storing container from said one platform using the other one of said first and second holders and place said another substrate storing container on said one platform using said one holder, and said controller determines whether or not an abnormality occurs in said first or second holder, and controls said transport device, when the abnormality occurs in one of said first and second holders, to stop an operation of said one holder, and to use said other holder to place said substrate storing container on said one of said platforms, to take said substrate storing container out from said one of said platforms, and to transport said substrate storing container among said plurality of platforms.