Method for operating an automatic handling system applied to many wafer processing apparatuses

摘要

The instant disclosure provides a method for operating an automatic handling system applied to many wafer processing apparatuses. When a OHT (Overhead Hoist Transport) vehicle is moved to one of the wafer processing apparatuses, the OHT vehicle can ask a OHT control module whether a wafer carrier device can be unloaded from the OHT vehicle onto the wafer processing apparatus. There are two judgment methods as follows: (1) If there is another wafer carrier device already disposed on the wafer processing apparatus, the OHT control module will inform the OHT vehicle that the wafer carrier device cannot be unloaded from the OHT vehicle onto the wafer processing apparatus; (2) If there is no any wafer carrier device disposed on the wafer processing apparatus, the OHT control module will inform the OHT vehicle that the wafer carrier device can be unloaded from the OHT vehicle onto the wafer processing apparatus.

主权项

1. A method for operating an automatic handling system applied to many wafer processing apparatuses, comprising the steps of:
providing at least one surrounding handling track, at least one first OHT (Overhead Hoist Transport) vehicle for carrying a first wafer carrier device, at least one second OHT vehicle, at least one first wafer processing apparatus, at least one second wafer processing apparatus for receiving a second wafer carrier device, at least one temporary wafer-receiving apparatus for receiving a third wafer carrier device, and a OHT vehicle control module for controlling the at least one first OHT vehicle and the at least one second OHT vehicle to move on the at least one surrounding handling track; simultaneously issuing a first unloading command and a first loading command to the at least one first OHT vehicle and the at least one second OHT vehicle from a main system control module, respectively; moving the at least one first OHT vehicle to the at least one first wafer processing apparatus for unloading the first wafer carrier device onto the at least one first wafer processing apparatus from the at least one first OHT vehicle; issuing a second loading command and a second unloading command to the at least one first OHT vehicle from the main system control module; moving the at least one first OHT vehicle to the at least one temporary wafer-receiving apparatus for loading the at least one first OHT vehicle with the third wafer carrier device from the at least one temporary wafer-receiving apparatus; moving the at least one first OHT vehicle to the at least one second wafer processing apparatus, for asking the OHT vehicle control module whether the third wafer carrier device can be unloaded onto the at least one second wafer processing apparatus from the at least one first OHT vehicle; informing the at least one first OHT vehicle by the OHT vehicle control module to stop unloading the third wafer carrier device onto the at least one second wafer processing apparatus from the at least one first OHT vehicle; issuing a surrounding command to the at least one first OHT vehicle from the OHT vehicle control module for continuously moving the at least one first OHT vehicle along the at least one surrounding handling track; moving the at least one second OHT vehicle to the at least one second wafer processing apparatus for loading the at least one second OHT vehicle with the second wafer carrier device from the at least one second wafer processing apparatus; moving the at least one first OHT vehicle to reach the at least one second wafer processing apparatus after finishing the surrounding command, for asking the OHT vehicle control module whether the third wafer carrier device can be unloaded onto the at least one second wafer processing apparatus from the at least one first OHT vehicle; informing the at least one first OHT vehicle by the OHT vehicle control module to unloading the third wafer carrier device onto the at least one second wafer processing apparatus from the at least one first OHT vehicle; and unloading the third wafer carrier device onto the at least one second wafer processing apparatus from the at least one first OHT vehicle.