Door for sealing an opening

摘要

A door for sealing an opening (2) in a wall (3) of a vacuum chamber (4) relative to the atmosphere includes a sealing element (1), which is attached to at least one rod (9, 9′, 9″) and which can be moved between an open position, in which the sealing element releases the opening (2), an intermediate position, in which the sealing element covers the opening (2) but is raised from a seat (7) surrounding the opening (2), and a closed position, in which the sealing element is pressed against the seat (7), a door body (10), which carries the at least one rod (9, 9′, 9″) and the sealing element (1) and which can be tilted about a tilt axis (20) relative to the wall (3) in order to move the sealing element (1) between the intermediate position and the closed position, and at least one tilting actuator (25, 25′, 26, 26′), which has an inner cavity (27) into which a compressed gas can be introduced in order to tilt the door element (10) about the tilt axis (20). At least one wall (39) of the tilting actuator (25, 25′, 26, 26′) bounding the inner cavity (27) is elastic and/or flexible at least over a section of the extent of the wall.

主权项

1. A door for closing an opening (2) in a chamber wall (3) of a vacuum chamber (4) from atmosphere, comprising: a closure element (1), which is fastened to at least one rod (9, 9′, 9″) and which can be adjusted between an open position in which the closure element releases the opening (2), an intermediate position, in which the closure element covers the opening (2) but is spaced apart from a seat (7) surrounding the opening (2), and a closed position in which the closure element is pressed against the seat (7), a door body (10) that carries the at least one rod (9, 9′, 9″) and the closure element (1), and which for adjusting the closure element (1) between the intermediate position and the closed position can be tilted in reference to the chamber wall (3) about a tilting axis (20), and at least one tilting actuator (25, 25′, 26, 26′) which includes an inner cavity (27) into which compressed gas is introducible in order to tilt the door body (10) about the tilting axis (28), at least one wall (39) limiting the inner cavity (27) of the tilting actuator (25, 25′, 26,26′) is at least one of elastic or flexible fashion at least over a section of its extension and is supported on at least one of a contact surface (38) of the door body (10), or on a contact surface (37) of the chamber wall (3), or of a fastening part (21) held on the chamber wall (3) wherein first and second of said tilting actuator (25, 26) are respectively arranged on opposite sides of the tilting axis (20), of each of which the at least one wall (39) respectively limiting the inner cavity (27) is embodied at least one of elastically or flexibly over at least a section of its extension and is supported on at least one of the contact surface (38) of the door body (10) or on the contact surface (37) of the chamber wall (3) or of the fastening part (21) held at the chamber wall (3).