Device for resonantly driving a micromechanical system

摘要

A device is provided for resonantly driving a micromechanical system, which includes at least one seismic mass supported by spring vibrations, at least one drive for driving the vibration of the seismic mass and at least one element that is motionally coupled to the seismic mass. Furthermore, the device includes at least one detection element for detecting a relational parameter, that changes with the vibration of the seismic mass, between the motionally coupled element and the detection element, the detection element being equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached.

主权项

1. A device for resonantly driving a micromechanical system, comprising:
at least one seismic mass supported by at least one spring; at least one drive for driving a vibration of the seismic mass; at least one element that is motionally coupled to the seismic mass; at least one detection element for detecting a relational parameter, between the motionally coupled element and the detection element, that is changeable with the vibration of the seismic mass; wherein the detection element is equipped to cause an interruption of the vibration drive when a predetermined value of the relational parameter is reached; wherein the detection element and the motionally coupled element each have a tunnel tip, which form a tunnel bridge for electric current, via which, at a predetermined approach of the two tunnel tips, a predetermined tunnel current flows, which has the effect of switching an interruption switch, interrupting the vibration drive.