Electrode forming apparatus

摘要

The invention aims at reducing unevenness at the intersections of mutually crossing electrodes with a method of and an apparatus for forming electrodes on a substrate. After forming a number of finger electrodes on a substrate, wide bus electrodes intersecting them are formed by application of an application liquid. Upon applying the application liquid which contains an electrode material and a photo-curing resin to the substrate, the application liquid is irradiated with UV light after a predetermined time and the application liquid is thus made to harden. A time difference since applying until light irradiation is set based on the result of measurement on changes of the height of the application liquid experimentally applied.

主权项

1. An electrode forming apparatus, comprising:
a substrate holder for holding a substrate which seats finger electrodes which extend in a first direction; a nozzle which discharges an application liquid which contains an electrode material; a light irradiator which irradiates light upon the application liquid applied to the substrate so as to harden the application liquid; a mover which moves the nozzle and the light irradiator relative to the substrate in a second direction which is different from the first direction; and an adjuster which adjusts a time since application of the application liquid to the substrate until hardening is performed by the light irradiator; wherein the light irradiator is held so as to be movable relative to the nozzle in the second direction; and wherein the mover moves the nozzle and the light irradiator together relative to the substrate, and the adjuster adjusts a distance between the nozzle and the light irradiator taken in the second direction.