Epitaxial replacement of a raised source/drain

摘要

Disclosed is a semiconductor article which includes a semiconductor substrate; a gate structure having a spacer adjacent to a conducting material of the gate structure wherein a corner of the spacer is faceted to create a faceted space between the faceted spacer and the semiconductor substrate; and a raised source/drain adjacent to the gate structure, the raised source/drain filling the faceted space and having a surface parallel to the semiconductor substrate. Also disclosed is a method of making the semiconductor article.

主权项

1. A method of epitaxial replacement of a raised source/drain (RSD) comprising steps of:
forming a gate structure on a semiconductor substrate; forming a faceted dummy RSD having facets adjacent to the gate structure such that a corner is formed at a juncture of the gate structure and the semiconductor substrate between the gate structure and one of the facets of the faceted dummy RSD, wherein the faceted dummy RSD is an RSD that is formed above a channel of the gate structure and is to be replaced with a real RSD in a subsequent process; forming a dielectric material over the corner to fill the corner, contact the gate structure and contact the one of the facets; removing the faceted dummy RSD adjacent to the gate structure to leave a faceted corner in the dielectric material formerly occupied by the faceted dummy RSD; forming the real RSD by epitaxially growing the real RSD adjacent to the gate structure including epitaxially growing the real RSD in the faceted corner in the dielectric material; wherein there are a plurality of gate structures and the steps of forming the faceted dummy RSD, forming the dielectric material over the corner, removing the faceted dummy RSD and forming the real RSD are performed for each gate structure and wherein at least one gate structure of the plurality of gate structures is for an nFET and at least one gate structure of the plurality of gate structures is for a pFET.