| 摘要 |
An inertial sensor includes oscillating-type angular velocity sensing element (32), IC (34) for processing signals supplied from angular velocity sensing element (32), capacitor (36) for processing signals, and package (38) for accommodating angular velocity sensing element (32), IC (34), capacitor (36). Element (32) and IC (34) are housed in package (38) via a vibration isolator, which is formed of TAB tape (46), plate (40) on which IC (34) is placed, where angular velocity sensing element (32) is layered on IC (34), and outer frame (44) placed outside and separately from plate (40) and yet coupled to plate (40) via wiring pattern (42). |
| 主权项 |
1. A sensor comprising:
a sensing element wherein the sensing element has a first member having an electrode pad and a second member on the first member, and a side surface of the first member and a side surface of the second member lie in the same plane at a portion connecting the first member and the second member; an IC on which the sensing element is mounted, comprising a first side, a second side, a third side, and a fourth side on a plane surface, the IC having pads at the first side of the IC and pads at the second side of the IC, the first side being opposite to the second side; and a package which houses the sensing element and the IC, the package having a first portion and a second portion positioned lower than the pads at the first side and the pads at the second side, wherein at least one of the pads at the first side is directly connected to the first portion via a first wire, at least one of the pads at the second side is directly connected to the second portion via a second wire, an area of the sensing element is smaller than an area of the IC in plan view, all of the pads at the first side are aligned straight on a first single imaginary straight line parallel to the first side, all of the pads at the second side are aligned straight on a second single imaginary straight line parallel to the second side, the IC has the third side perpendicular to the first side of the IC and the fourth side opposite to the third side, andno pads are at the third side and no pads are at the fourth side of the IC. |
