Methods for producing a thin film consisting of nanosheet monolayer film(s) by spin coat methods, and hyperhydrophilized materials, substrates for an oxide thin film and dielectric materials obtained therefrom

摘要

To provide a method for producing a thin film consisting of nanosheet monolayer film(s) and use of the thin film obtained thereby.;The method for producing a thin film consisting of nanosheet monolayer film(s) by a spin coat method according to the invention comprises a step for preparing an organic solvent sol formed by allowing nanosheets obtained by the exfoliation of an inorganic layered compound to be dispersed in an organic solvent; and a step for dropping the organic solvent sol onto a substrate and rotating the substrate using a spin coater. Preferably, the nanosheet size, the organic solvent sol concentration and the spin coater rotation speed are controlled.

主权项

1. A method for producing a thin film consisting of nanosheet monolayer film(s) in which nanosheets obtained by the exfoliation of an inorganic layered compound are aligned densely without overlapping in every monolayer by a spin coat method comprising:
a step for preparing an organic solvent sol formed by allowing nanosheets to be dispersed in an organic solvent; and a step for dropping the organic solvent sol onto a substrate and rotating the substrate using a spin coater; wherein the inorganic layered compound is selected from the group consisting of layered perovskite oxide, layered manganese oxide, layered cobalt oxide, layered manganese-cobalt oxide, layered manganese-iron oxide, layered tungsten oxide, layered niobium oxide, layered tantalum oxide, layered titanium-niobium oxide, layered titanium-tantalum oxide, layered molybdenum oxide, and layered ruthenium oxide, in the step involving rotating, the relationship between the organic solvent sol concentration and the spin coater rotation speed is a relationship of a quadratic function, and the relationship of a quadratic function depends on the type and the size of the nanosheet.