Methods of fabricating MEMS with spacers between plates and devices formed by same

摘要

Methods of fabricating an electromechanical systems (EMS) device with spacers between plates and EMS devices formed by the same are disclosed. In one embodiment, a EMS device is fabricated by laminating a front substrate and a carrier, each of which has components preformed thereon. The front substrate is provided with stationary electrodes formed thereover. A carrier including movable electrodes formed thereover is attached to the front substrate. The carrier may be released after transferring the movable electrodes to the front substrate. In other embodiments, the carrier stays over the front substrate, and serves as a backplate for the EMS device. Features are formed by deposition and patterning, by embossing, or by patterning and etching. Spacers are provided between the front substrate and the backplate to maintain a gap therebetween. The resulting EMS devices can trap smaller volumes between laminated substrates and are less susceptible to pressure variations and moisture leakage.

主权项

1. An electromechanical system device, comprising:
a front substrate having a first surface, the front substrate including an optical stack formed over the first surface; a backplate opposing the front substrate, the backplate having a second surface facing the first surface, the backplate including:
supports extending from the second surface toward the first surface such that the height of the supports defines a distance between the first surface and the second surface; anda plurality of posts projecting from the backplate towards the front substrate; and a plurality of movable electrode strips extending substantially parallel to one another, the strips being suspended from the plurality of posts, spaced apart from the front substrate and the backplate, and interposed between the first surface and the second surface.