Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices

摘要

A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction of gases or liquids to specimens for in situ imaging, as well as electrical contacts for electrochemical or thermal experiments.

主权项

1. A sample holder for an electron microscope, said sample holder comprising a sample holder body and a sample holder lid, wherein the sample holder body comprises a deep pocket having a deep pocket bottom and deep pocket walls for the positioning of a first microelectronic device therein and a shallow pocket having a shallow pocket bottom and shallow pocket walls for the positioning of a second microelectronic device therein, wherein a deep sealing means is positioned on the deep pocket bottom and surrounds a hole such that a seal is formed around the hole when pressure is applied to the first microelectronic device, and wherein a shallow sealing means is positioned on the shallow pocket bottom and surrounds the first microelectronic device such that when pressure is applied to the second microelectronic device a seal is formed and fluids cannot escape from around the first and second microelectronic devices, and the sample holder lid has a top side and a bottom side.