Charged particle beam lens having a particular support electrically insulating first and second electrodes from each other

摘要

A charged particle beam lens includes a first electrode including a surface having at least one aperture and a second electrode including a surface having at least one aperture. A support intervenes between the first electrode and the second electrode to electrically insulate the first and second electrodes from each other and to support the first and second electrodes in a predetermined positional relationship. A side surface of the support intervenes between the first electrode and the second electrode and includes a non-flat portion having at least one of a projected portion and a depressed portion, and includes a tapered portion. A taper angle formed by the tapered portion and the surface having the aperture of the second electrode is greater than zero degree and less than ninety degrees.

主权项

1. A charged particle beam lens comprising:
a first electrode including a surface having at least one aperture; a second electrode including a surface having at least one aperture; and a support intervening between the first electrode and the second electrode to electrically insulate the first and second electrodes from each other and to support the first and second electrodes in a predetermined positional relationship, wherein a side surface of the support intervening between the first electrode and the second electrode includes a non-flat portion having at least one of a projected portion and a depressed portion and includes a tapered portion, and wherein a taper angle formed by the tapered portion and the surface having the aperture of the second electrode is greater than zero degrees and less than ninety degrees.