Transport system

摘要

A semiconductor workpiece processing system including at least one substrate processing tool that has a common housing with a first side having a first substrate holding container interface and a second side having a second substrate holding container interface having a different orientation than the first substrate holding container interface, a first transport section disposed corresponding to the first side of the tool, a second transport section being separate and distinct from the first transport section and interfacing with the first transport section and being configured to transport the substrate holding container between the first transport section and the tool and between the first side and the second side of the tool, the second transport section including at least one overhead gantry disposed above the tool, where the second transfer section is capable of interfacing with at least the second substrate holding container interface.

主权项

1. A semiconductor workpiece processing system comprising:
at least one substrate processing tool for processing semiconductor substrates, the at least one substrate processing tool has a common housing with a first side having a first substrate holding container interface and a second side having a second substrate holding container interface having a different orientation than the first substrate holding container interface; a first transport section elongated and defining a travel direction, and having parts, that interface a substrate holding container, supporting and transporting the substrate holding container along the travel direction, the first transport section being disposed corresponding to the first side of the at least one substrate processing tool; a second transport section being separate and distinct from the first transport section, the second transport section interfacing with the first transport section and being configured to transport the substrate holding container between the first transport section and the at least one substrate processing tool and between the first side and the second side of the at least one substrate processing tool, the second transport section including at least one overhead gantry disposed above the at least one substrate processing tool, where the second transfer section is configured to interface with at least the second substrate holding container interface.